Mass Flowmeters and Controllers

This category contains sensors that indicate flow rate for low flow systems. The mass flowmeters monitor flow, pressure, and temperature. Some products are programmable.
Gas Flowmeter Selection Guide

Series GFM Gas Mass Flow Meter

Flow Range Up to 1000 L/min, Pressures Up to 500 psi, NIST Traceable

Series GFM Gas Mass Flow Meters combine a straight tube sensor with a restrictor flow element to provide high accuracy and repeatability. Flow rates are virtually unaffected by temperature and pressure variations. Actual gas flow is displayed in engineering units on a 3-1/2 digit, 90° tiltable LCD readout. Units can be used with Series GFT Flow Totalizer for applications requiring totalization. Series GFM includes a NIST traceable certificate.

Note: These units require a cable, see GFM-CBL4 or GFM-CBL5, depending on your needs.

Models & Ordering

Model	Description
GFM-1101	Gas mass flow meter, range 0-10 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1102	Gas mass flow meter, range 0-20 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1103	Gas mass flow meter, range 0-50 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1104	Gas mass flow meter, range 0-100 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1105	Gas mass flow meter, range 0-200 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1106	Gas mass flow meter, range 0-500 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1107	Gas mass flow meter, range 0-1000 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1108	Gas mass flow meter, range 0-2 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1109	Gas mass flow meter, range 0-5 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1111	Gas mass flow meter, range 0-15 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1131	Gas mass flow meter, range 0-30 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1133	Gas mass flow meter, range 0-50 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFM-1142	Gas mass flow meter, range 0-100 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 3/8" compression fitting.
GFM-1143	Gas mass flow meter, range 0-200 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 3/8" compression fitting.
GFM-1144	Gas mass flow meter, range 0-500 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/2" compression fitting.
GFM-1145	Gas mass flow meter, range 0-1000 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 3/4" compression fitting.

Series GFM2 Gas Mass Flow Meter

±1% FS, Programmable Relays

The SERIES GFM2 Gas Mass Flow Meter is an ideal choice for the measurement of flow rates of a wide variety of gases. Unit can be calibrated for a variety of gases with user selectable 0 to 5 VDC or 4 to 20 mA and two relay outputs and programmable totalizer that indicates total gas quantity.

Product Applications

Gas flow measurement
Gas glow control
Operating pumps and valves
Process equipment
Vacuum processes
Glass and metal coating
Film deposition

Series GFM3 Gas Mass Flow Meter

Flow Monitoring, Push-Button Configuration

The Series GFM3 Gas Mass Flow Meter is an ideal choice for the measurement of flow rates of a wide variety of gases. This digital flow meter features a 12-digit totalizer for total gas volume indication, and is available in the choice of 0 to 5 VDC, 0 to 10 VDC, or 4 to 20 mA output signals. Standard LCD and four button keypad allows easy access to the many features of the GFM3. Digital interface operates through available RS-485 or RS-232, providing access to internal data parameters and multi-drop capability of up to 255 units (RS-485 only). Set alarms remotely via digital interface for flow to alert user of high or low thresholds being exceeded. With a high ±1% FS accuracy and ±0.25% FS repeatability, the GFM3 is the optimal choice in gas flow metering and monitoring. The GFM3 comes with a NIST traceable certificate.

Product Applications

Gas Monitoring
Operating Pumps and Valves
Process Equipment
Vacuum Processes
Glass and Metal Coating
Film Deposition

Series GFM4 Gas Mass Flow Meter

Pressure, Temperature and Flow Monitoring

The Series GFM4 Gas Mass Flow Meter is an ideal choice for the measurement of flow rates of a wide variety of gases. This multi parameter flow meter supports various functions such as flow totalizer, flow, temperature, and pressure alarms, and is available in a choice of 0 to 5VDC, 0 to 10VDC, or 4 to 20 mA output signals. Standard LCD and four button keypad allows easy access to the many features of the GFM4. Digital interface operates through available RS-485 or RS-232, providing access to internal data parameters and multi-drop capability of up to 255 units (RS-485 only). Set alarms remotely via digital interface for flow, pressure, and temperature to alert user of high or low thresholds being exceeded. With a high ±1% FS accuracy and ±0.25% FS repeatability, the GFM4 is the optimal choice in gas flow metering and monitoring. The GFM4 comes with a NIST traceable certificate.

Product Applications

Gas flow measurement
Gas flow control
Operating pumps and valves
Process equipment
Vacuum processes
Glass and metal coating
Film deposition

Series GFC Gas Mass Flow Controllers

Flow Range Up to 1000 L/min, Pressures Up to 1000 psi, NIST Traceable

Series GFC Gas Mass Flow Controller - Flow Range Up to 1000 L/min, Pressures Up to 500 psi, NIST Traceable

Series GFC Gas Mass Flow Controller - Flow Range Up to 1000 L/min, Pressures Up to 500 psi, NIST Traceable, GFC-1145 shown

The SERIES GFC Gas Mass Flow Controllers combine a straight tube sensor with a restrictor flow element. It is available for flow ranges up to 1000 L/min and offered in aluminum or 316 SS in 1/4", 3/8", 1/2" and 3/4" sizes.

Product Applications

Gas flow measurement
Gas flow control
Operating pumps and valves
Process equipment
Vacuum processes
Glass and metal coating
Film depostition

Models & Ordering

Model	Description
GFC-1101	Gas mass flow controller, range 0-10 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1102	Gas mass flow controller, range 0-20 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1103	Gas mass flow controller, range 0-50 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1104	Gas mass flow controller, range 0-100 mL/m (SCCM). Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1105	Gas mass flow controller, range 0-200 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1106	Gas mass flow controller, range 0-500 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1107	Gas mass flow controller, range 0-1000 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1108	Gas mass flow controller, range 0-2 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1109	Gas mass flow controller, range 0-5 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1111	Gas mass flow controller, range 0-15 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1131	Gas mass flow controller, range 0-30 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1133	Gas mass flow controller, range 0-50 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting.
GFC-1142	Gas mass flow controller, range 0-100 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 3/8" compression fitting.
GFC-1143	Gas mass flow controller, range 0-200 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 3/8" compression fitting.
GFC-1144	Gas mass flow controller, range 0-500 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/2" compression fitting.
GFC-1145	Gas mass flow controller, range 0-1000 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 3/4" compression fitting.

Series DMF Digital Mass Flow Controller

Programmable, RS485 Interface, Up To 500 psig, ±1% Accuracy

Series DMF Digital Mass Flow Controller - Programmable, RS485 Interface, Up To 500 psig, ±1% Accuracy

DMF-CBL1, 6 ft cable with branch to separate power supply.

CMF-CBL2, 6 ft cable with branch to computer port.

Program, record, analyze, and control flow rates of various gases with Series DMF Digital Mass Flow Controller. Controllers are designed with straight tube sensors with restrictor flow elements to ensure laminar gas flow for accurate and repeatable results. Series DMF are unaffected by temperature and pressure variations.

Controllers can be programmed for various control functions including flow set point, totalizer, stop totalizer, totalize from preset flow, stop and preset total, auto zero, and more. Auto zero feature utilizes an automatic balancing circuit that virtually eliminates drift of zero and span. In addition, Series DMF controllers have two dry contact closures to operate pumps, valves, or other process equipment.

The Series DMF features an auto tune function to optimize control response for a specific gas under actual process conditions. Self diagnostic tests are run at power up to ensure the controller is in optimum working condition. Calibration information for up to 10 gases and conversion factors for up to 256 different gases are stored in memory. High and low gas flow alarm limits are programmed via RS-485 interface. Software supports programmable flow modes, allowing execution of custom programming of up to ten steps

Models & Ordering

Model	Description
DMF-41402	Digital mass flow controller, range 0-20 sccm. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41403	Digital mass flow controller, range 0-50 sccm. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41404	Digital mass flow controller, range 0-100 sccm. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41405	Digital mass flow controller, range 0-200 sccm. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41406	Digital mass flow controller, range 0-500 sccm. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41407	Digital mass flow controller, range 0-1 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41408	Digital mass flow controller, range 0-2 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41409	Digital mass flow controller, range 0-5 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41411	Digital mass flow controller, range 0-15 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41431	Digital mass flow controller, range 0-30 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41433	Digital mass flow controller, range 0-50 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.
DMF-41842	Digital mass flow controller, range 0-100 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg.